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1

Nano-imprinting lithography of P(VDF–TrFE–CFE) for flexible freestanding MEMS devices

Jenny Shklovsky, Leeya Engel, Yelena Sverdlov, Yosi Shacham-Diamand, Slava Krylov

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.56 MB

english, 2012

2

Electrochemically deposited thin film alloys for ULSI and MEMS applications

Y. Shacham-Diamand, Y. Sverdlov

Journal:

Microelectronic Engineering

Year:

2000

Language:

english

File:

PDF, 448 KB

english, 2000

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Metrology, Inspection, and Process Control for Microlithography XXIV - Measurements and sensitivities of LWR in poly spacers

Ayal, Guy, Raymond, Christopher J., Shauly, Eitan, Levi, Shimon, Siany, Amit, Adan, Ofer, Shacham-Diamand, Yosi

Year:

2010

Language:

english

File:

PDF, 1.60 MB

english, 2010

4

Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications || Diffusion Barriers for Ultra-Large-Scale Integrated Copper Metallization

Shacham-Diamand, Yosi, Osaka, Tetsuya, Datta, Madhav, Ohba, Takayuki

Year:

2009

Language:

english

File:

PDF, 1.30 MB

english, 2009

5

“Cells-on-beads”: A novel immobilization approach for the construction of whole-Cell amperometric biosensors

Yoetz-Kopelman, Tal, Dror, Yael, Shacham-Diamand, Yosi, Freeman, Amihay

Journal:

Sensors and Actuators B: Chemical

Year:

2016

Language:

english

File:

PDF, 987 KB

english, 2016

6

Electroless copper deposition for ULSI

Yosi Shacham-Diamand, Valery Dubin, Matthew Angyal

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 1.21 MB

english, 1995

7

[IEEE 2019 IEEE International Symposium on Circuits and Systems (ISCAS) - Sapporo, Japan (2019.5.26-2019.5.29)] 2019 IEEE International Symposium on Circuits and Systems (ISCAS) - Four Point Probe Electrical Spectroscopy Based System for Plant Monitoring

Bar-on, Lee, Jog, Aakash, Shacham-Diamand, Yosi

Year:

2019

Language:

english

File:

PDF, 535 KB

english, 2019

8

Holes Generation in Glass using Large Spot Femtosecond Laser Pulses

Berg, Yuval, Kotler, Zvi, Shacham-Diamand, Yosi

Journal:

Journal of Micromechanics and Microengineering

Year:

2018

Language:

english

File:

PDF, 609 KB

english, 2018

9

Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications || Advanced BEOL Technology Overview

Shacham-Diamand, Yosi, Osaka, Tetsuya, Datta, Madhav, Ohba, Takayuki

Year:

2009

Language:

english

File:

PDF, 1.75 MB

english, 2009

10

Electron-Bombarded CMOS Image Sensor in Single Photon Imaging Mode

Rabner, Arthur, Shacham-Diamand, Yosi

Journal:

IEEE Sensors Journal

Year:

2011

Language:

english

File:

PDF, 1.39 MB

english, 2011

11

Barrier layers for Cu ULSI metallization

Yosi Shacham-Diamand

Journal:

Journal of Electronic Materials

Year:

2001

Language:

english

File:

PDF, 179 KB

english, 2001

12

Modeling of the MOSFET inversion charge and drain current, in moderate inversion

Altschul, V., Shacham-Diamand, Y.

Journal:

IEEE Transactions on Electron Devices

Year:

1990

Language:

english

File:

PDF, 631 KB

english, 1990

13

Characterization Methods of a Whole-Cell Bioluminescent Biosensor

Daniel, Ramiz, Almog, Ronen, Shacham-Diamand, Yosi

Journal:

IEEE Sensors Journal

Year:

2010

Language:

english

File:

PDF, 518 KB

english, 2010

14

Femtosecond laser processing of ceria-based micro actuators

Mishuk, Eran, Shklovsky, Jenny, Berg, Yuval, Vengerovsky, Niv, Paul, Tanmoy, Kotler, Zvi, Tsur, Yoed, Shacham-Diamand, Yosi, Krylov, Slava, Lubomirsky, Igor

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.39 MB

english, 2019

15

Integrated electroless metallization for ULSI

Yosi Shacham-Diamand, Sergey Lopatin

Journal:

Electrochimica Acta

Year:

1999

Language:

english

File:

PDF, 289 KB

english, 1999

16

[IEEE 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems - COMCAS - Tel Aviv, Israel (2009.11.9-2009.11.11)] 2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems - A beyond 60GHz cross-coupled fundamental VCO in 45nm CMOS

Katz, Alex, Degani, Ofir, Shacham-Diamand, Yosi, Socher, Eran

Year:

2009

Language:

english

File:

PDF, 435 KB

english, 2009

17

[IEEE 2020 IEEE International Symposium on Circuits and Systems (ISCAS) - Sevilla (2020.10.12-2020.10.14)] 2020 IEEE International Symposium on Circuits and Systems (ISCAS) - In-Vivo Dehydration Sensing in Transgenic Tobacco Plants using an Integrated Electrochemical Chip

Desagani, Dayananda, Jog, Aakash, Avni, Adi, Shacham-Diamand, Yosi

Year:

2020

File:

PDF, 671 KB

2020

18

Silver Electroless Finishing of Selective Laser Melting 3D-Printed AlSi10Mg Artifacts

Dresler, N., Inberg, A., Ashkenazi, D., Shacham-Diamand, Y., Stern, A.

Journal:

Metallography, Microstructure, and Analysis

Year:

2019

Language:

english

File:

PDF, 3.73 MB

english, 2019

19

Directed Metallization of Single-Enzyme Molecules With Preserved Enzymatic Activity

Vernick, S., Moscovich-Dagan, H., Porat-Ophir, C., Rishpon, J., Freeman, A., Shacham-Diamand, Y.

Journal:

IEEE Transactions on Nanotechnology

Year:

2009

Language:

english

File:

PDF, 328 KB

english, 2009

20

Towards fully polymeric electroactive micro actuators with conductive polymer electrodes

Shklovsky, Jenny, Reuveny, Amir, Sverdlov, Yelena, Krylov, Slava, Shacham-Diamand, Yosi

Journal:

Microelectronic Engineering

Year:

2018

Language:

english

File:

PDF, 4.13 MB

english, 2018

21

Spin-on-glass for 200 nm trench isolation structures

Lutze, J W, Shacham-Diamand, Y Y, Krusius, J P

Journal:

Journal of Micromechanics and Microengineering

Year:

1991

Language:

english

File:

PDF, 1.76 MB

english, 1991

22

Platinum-nickel bimetallic nanoclusters ensemble-on-polyaniline nanofilm for enhanced electrocatalytic oxidation of dopamine

Yadav, Anupam, Pandey, Richa, Liao, Ting-Wei, Zharinov, Vyacheslav S., Hu, Kuo-Juei, Vernieres, Jerome, Palmer, Richard Edward, Lievens, Peter, Grandjean, Didier, Shacham-Diamand, Yosi

Journal:

Year:

2020

Language:

english

File:

PDF, 2.74 MB

english, 2020

23

Modeling of Novolak-based positive photoresist exposed to KrF excimer laser UV radiation at 248 nm

Shacham-Diamand, Y.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

1990

Language:

english

File:

PDF, 832 KB

english, 1990

24

Bioluminescence Detection Using a Novel MEMS Modulation Technique

Elman, N.M., Krylov, S., Sternheim, M., Shacham-Diamand, Y.

Journal:

IEEE Photonics Technology Letters

Year:

2006

Language:

english

File:

PDF, 1.15 MB

english, 2006

25

Void-Free Trench-Filling by Electroless Copper Deposition Using the Combination of Accelerating and Inhibiting Additives

Hasegawa, Madoka, Okinaka, Yutaka, Shacham-Diamand, Yosi, Osaka, Tetsuya

Journal:

Electrochemical and Solid-State Letters

Year:

2006

Language:

english

File:

PDF, 164 KB

english, 2006

26

Integrated electrochemical Chip-on-Plant functional sensor for monitoring gene expression under stress

Pandey, Richa, Teig-Sussholz, Orian, Schuster, Silvia, Avni, Adi, Shacham-Diamand, Yosi

Journal:

Biosensors and Bioelectronics

Year:

2018

Language:

english

File:

PDF, 1.56 MB

english, 2018

27

Electroless deposition of NiWB alloy on p-type Si(1 0 0) for NiSi contact metallization

A. Duhin, Y. Sverdlov, Y. Feldman, Y. Shacham-Diamand

Journal:

Electrochimica Acta

Year:

2009

Language:

english

File:

PDF, 788 KB

english, 2009

28

Electrical Impedance Spectroscopy of plant cells in aqueous biological buffer solutions and their modelling using a unified electrical equivalent circuit over a wide frequency range: 4Hz to 20Â GHz

Kadan-Jamal, Kian, Sophocleous, Marios, Jog, Aakash, Desagani, Dayananda, Teig-Sussholz, Orian, Georgiou, Julius, Avni, Adi, Shacham-Diamand, Yosi

Journal:

Biosensors and Bioelectronics

Year:

2020

File:

PDF, 4.21 MB

2020

29

[IEEE 2020 IEEE International Symposium on Circuits and Systems (ISCAS) - Sevilla (2020.10.12-2020.10.14)] 2020 IEEE International Symposium on Circuits and Systems (ISCAS) - Towards Optimal Green Plant Irrigation: Watering and Body Electrical Impedance

Garlando, Umberto, Bar-On, Lee, Ros, Paolo Motto, Sanginario, Alessandro, Peradotto, Sebastian, Shacham-Diamand, Yosi, Avni, Adi, Martina, Maurizio, Demarchi, Danilo

Year:

2020

File:

PDF, 1.68 MB

2020

30

Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators

Noel M. Elman, Slava Krylov, Marek Sternheim, Yosi Shacham-Diamand

Journal:

Microsystem Technologies

Year:

2008

Language:

english

File:

PDF, 403 KB

english, 2008

31

Characterization of electroless deposited Co(W,P) thin films for encapsulation of copper metallization

A. Kohn, M. Eizenberg, Y. Shacham-Diamand, Y. Sverdlov

Journal:

Materials Science and Engineering: A

Year:

2001

Language:

english

File:

PDF, 345 KB

english, 2001

32

A novel algorithm to enhance blurred microscopy images of metallic ultra thin-films microstructures

Hamootal Duadi, Pavel Livshits, Eran Gur, Alexandra Inberg, Yosi Shacham-Diamand, Aryeh Weiss, Zeev Zalevsky

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 470 KB

english, 2012

33

High aspect ratio quarter-micron electroless copper integrated technology: Invited lecture

Yosi Shacham-Diamand, Sergey Lopatin

Journal:

Microelectronic Engineering

Year:

1997

Language:

english

File:

PDF, 655 KB

english, 1997

34

Improvement of Temperature Coefficient of Resistance by Co-Implantation of Argon or Xenon or Fluorine in Boron Implanted Polysilicon Resistors

Ashuah, I., Shauly, E.N., Shacham-Diamand, Y.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2009

Language:

english

File:

PDF, 1.52 MB

english, 2009

35

Gold Nanoparticle Metallization of Flexible Conducting Polymer Electrode

Ofek Almog, R., Pandey, R., Sverdlov, Y., Shacham-Diamand, Y.

Journal:

ECS Transactions

Year:

2015

Language:

english

File:

PDF, 9.16 MB

english, 2015

36

Copper electroless deposition technology for ultra-large-scale-integration (ULSI) metallization

Yosi Shacham-Diamand, Valery M. Dubin

Journal:

Microelectronic Engineering

Year:

1997

Language:

english

File:

PDF, 711 KB

english, 1997

37

Thermoplastic nanoimprint lithography of electroactive polymer poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) for micro/nanoscale sensors and actuators

Engel, Leeya, Krylov, Slava, Shacham-Diamand, Yosi

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2014

Language:

english

File:

PDF, 2.12 MB

english, 2014

38

Evaluation of electroless deposited Co(W,P) thin films as diffusion barriers for copper metallization

A. Kohn, M. Eizenberg, Y. Shacham-Diamand, B. Israel, Y. Sverdlov

Journal:

Microelectronic Engineering

Year:

2001

Language:

english

File:

PDF, 231 KB

english, 2001

39

Electroless Deposition of Thin-Film Cobalt-Tungsten-Phosphorus Layers Using Tungsten Phosphoric Acid (H[sub 3][P(W[sub 3]O[sub 10])[sub 4]]) for ULSI and MEMS Applications

Shacham-Diamand, Yosi, Sverdlov, Y., Petrov, N.

Journal:

Journal of The Electrochemical Society

Year:

2001

Language:

english

File:

PDF, 290 KB

english, 2001

40

Large angle SOI tilting actuator with integrated motion transformer and amplifier

A. Ya’akobovitz, S. Krylov, Y. Shacham-Diamand

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1.85 MB

english, 2008

41

The electrical and material properties of MOS capacitors with electrolessly deposited integrated copper gate

Yosi Shacham-Diamand, Barak Israel, Yelena Sverdlov

Journal:

Microelectronic Engineering

Year:

2001

Language:

english

File:

PDF, 211 KB

english, 2001

42

Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications || Electroless Deposition Processes and Tools

Shacham-Diamand, Yosi, Osaka, Tetsuya, Datta, Madhav, Ohba, Takayuki

Year:

2009

Language:

english

File:

PDF, 809 KB

english, 2009

43

A study toward the development of an electromechanical poly(vinylidene fluoride–trifluoroethylene–chlorofluoroethylene) buckling membrane actuator

Engel, Leeya, Kruk, Shahar, Shklovsky, Jenny, Shacham-Diamand, Yosi, Krylov, Slava

Journal:

Journal of Micromechanics and Microengineering

Year:

2014

Language:

english

File:

PDF, 6.94 MB

english, 2014

44

Characterization of silane based ultra-thin barrier deposited at elevated temperature

Kadan-Jamal, Kian, Almog, Rakefet Ofek, Zhou, Junyi, Dotan, Tali, Sverdlov, Yelena, Dagan, Ronen, Shacham-Diamand, Yosi

Journal:

Microelectronic Engineering

Year:

2021

File:

PDF, 2.23 MB

2021

45

Soft and flexible gold microelectrodes by supersonic cluster beam deposition and femtosecond laser processing

Dotan, Tali, Berg, Yuval, Migliorini, Lorenzo, Villa, Sara Moon, Santaniello, Tommaso, Milani, Paolo, Shacham-Diamand, Yosi

Journal:

Microelectronic Engineering

Year:

2021

File:

PDF, 3.65 MB

2021

46

Evidence for “superfilling” of submicrometer trenches with electroless copper deposit

Hasegawa, Madoka, Yamachika, Noriyuki, Shacham-Diamand, Yosi, Okinaka, Yutaka, Osaka, Tetsuya

Journal:

Applied Physics Letters

Year:

2007

Language:

english

File:

PDF, 403 KB

english, 2007

47

[Nanostructure Science and Technology] Electrochemical Nanotechnologies || Microelectronic Packaging Trends and the Role of Nanotechnology

Osaka, Tetsuya, Datta, Madhav, Shacham-Diamand, Yosi

Year:

2010

Language:

english

File:

PDF, 1.78 MB

english, 2010

48

Local electrochemical control of hydrogel microactuators in microfluidics

Engel, Leeya, Liu, Chengming, Mintz Hemed, Nofar, Khan, Yasser, Arias, Ana Claudia, Shacham-Diamand, Yosi, Krylov, Slava, Lin, Liwei

Journal:

Journal of Micromechanics and Microengineering

Year:

2018

Language:

english

File:

PDF, 4.77 MB

english, 2018

49

Copper Transport in Thermal SiO[sub 2]

Shacham-Diamand, Y.

Journal:

Journal of The Electrochemical Society

Year:

1993

Language:

english

File:

PDF, 727 KB

english, 1993

50

100 nm wide copper lines made by selective electroless deposition

Shacham-Diamand, Y

Journal:

Journal of Micromechanics and Microengineering

Year:

1991

Language:

english

File:

PDF, 852 KB

english, 1991

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